Handbook of Vacuum Science and Technology
The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner.
Key Features
* User oriented with many useful tables, charts, and figures of use to the practitioner
* Reviews new vacuum materials and equipment
* Illustrates the design and maintenance of modern vacuum systems
* Includes well referenced chapters… More >>
Handbook of Vacuum Science and Technology
Tagged with: Handbook • Science • Technology • Vacuum
I did a little research before I bought this book. It turns out that it paid off – this is a great book for vacuum technology. As a designer of UHV semiconductor equipment, I would highly recommend this text. I bought one more book on the subject at the same time – this one is the better overall choice for complete coverage.
I am still looking for a reference that has tips and trick of the trade – but there is enough info in this book to point you in the right direction.
I found the handbook a great reference to all types of vacuum systems. I especially liked information regarding building materials used in vacuum systems.
I’d recommend this book to anyone having basic vacuum knowledge and would like to see different alternatives / ways in creating vacuum.